The cleanroom is a controlled environment that filters pollutants from working areas to provide the cleanest laboratory environment possible. The multi-bay cleanroom at UConn IMS provides ISO-certified work spaces and hoods for users to perform fabrications of microelectronics and risk-minimized processing of delicate samples requiring cleanroom processes.
Standard Hourly Rates and Equipment Pricing:
| Internal | External Non-Profit/Academic | External Corporate | |
| Cleanroom Base Rate (Daily) | $25.00 | $30.00 | $120.00 |
| Atomic Layer Deposition (ALD) - Cambridge Nanotech Savannah S100 | $25.00 | $100.00 | |
| Atomic Layer Deposition (ALD) - Fiji G2.0 Plasma | $25.00 | $100.00 | |
| Maskless Aligner - Heidelberg Instruments µMLA System | $30.00 | $120.00 | |
| Mask Aligner - OAI Model 200 | $30.00 | $120.00 | |
| Reactive Ion Etcher (RIE) - Vision 320 RIE Advanced Vacuum | $40.00 | $160.00 | |
| Tergeo Plasma Cleaner - PIE Scientific | $20.00 | $80.00 | |
| Wire Bonder - West Bond 7KF | $25.00 | $100.00 | |
| Microscope - AmScope Binocular Microscope | |||
| Training by Lab Manager | $75.00 | $100.00 | $150.00 |
| Staff Support in Cleanroom | $60.00 | $80.00 | $120.00 |
| Lab Manager: Dr. Mustafa Yavuz (mustafa.yavuz@uconn.edu) Lab Supervisor: Dr. Steven L. Suib (steven.suib@uconn.edu) rev. 09/12/2024 |
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