IMS Clean Room - Gowning Area

The cleanroom at UConn IMS is 2,000 square feet under filter with a 3,900 square foot service area. There are four distinct research bays, each associated with a different cleanroom process, and all arranged in a linear sequence of increasing cleanliness, starting at ISO 5 and progressing to ISO 4. Each space is provided with services and infrastructure to support the associated tooling.

Etching

Etching

Deposition

       Deposition

Characterization

       Characterization

Lithography

Lithography