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Institute of Materials Science

UConn IMS Cleanroom

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UConn IMS Cleanroom
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  • Cleanroom Instrumentation
    • All Instrumentation
    • Bay 1: Etching
    • Bay 2: Deposition
    • Bay 3: Characterization
    • Bay 4: Lithography
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A-Z Index

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A

  1. A-Z Index
  2. About The Cleanroom

B

  1. Bay 1: Etching
  2. Bay 2: Deposition
  3. Bay 3: Characterization
  4. Bay 4: Lithography
  5. Blank Template

C

  1. Cleanroom Access
  2. Cleanroom Instrumentation
  3. Cleanroom Request Form
  4. Contact

R

  1. Rates

Contact Us
Mustafa Yavuz, Manager
The Cleanroom at UConn IMS
25 King Hill Road, Unit 3136
Storrs, CT 06269-3136
(860) 486-2256
mustafa.yavuz@uconn.edu

Instrumentation and Equipment
Etching Bay
Deposition Bay
Characterization Bay
Lithography Bay
All Instrumentation and Equipment

Rates and Request Form
Current Rates
Cleanroom Request Form

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