The cleanroom at UConn IMS is 2,000 square feet under filter with a 3,900 square foot service area. There are four distinct research bays, each associated with a different cleanroom process, and all arranged in a linear sequence of increasing cleanliness, starting at ISO 5 and progressing to ISO 4. Each space is provided with services and infrastructure to support the associated tooling. The four bays include Etching Bay, Deposition Bay, Characterization Bay, and Lithography Bay.
The gowning room is a critical barrier to reduce the risk of contamination coming into the cleanroom from outside. Prior to entering the cleanroom, individuals are equipped with special outfitting. All other cleanroom compatible items to be brought into the cleanroom are subjected to appropriate sanitation measures prior to being allowed into cleanroom areas.
Cleanroom Gowning Requirements
- Coveralls
- Shoe covers/booties
- Head Cover
- Beard Cover
- Gloves
- Masks
- Hoods
Use of the Science 1 Cleanroom facilities may be arranged in the following manners:
- Submitting one-time jobs
- Small fee-for-service contracts
- Use of cleanroom by outside parties (academic and industrial)
- Research contracts
- Center of Excellence Programs - Multifaceted research use of facilities by others, Course development, training
- Joint proposals