Bay 3: Characterization
Other Equipment
There are six wet chemistry fume hoods, a combination of stainless steel and polymer units designed for various chemical processing tasks (cleaning, wet etching, etc.) employed in semiconductor and microelectronic device fabrication.
Hood 3 in Bay Area 3 (Solvent Hood) provides a comprehensive selection of developers and removers for various development processes. Hood 4 in Bay Area 3 (Sonicator Hood) is a stainless-steel hood featuring an ultrasonic bath for cleaning applications.
The UN30plus Memmert Universal Oven is a high-quality, hygienic, easy-to-clean stainless steel oven for precisely tuned heating/drying samples under nitrogen atmosphere with unique ventilation control technology and over-temperature protection. Set temperature range: min. 5°C above ambient up to +300°C. Resolution of display for setpoint values 0.1°C up to 99.9°C, and 0.5°C from 100°C to 300 °C.