Bay 3: Characterization

IMS Cleanroom bay 3 sign

Binocular Microscope

AmScope Binocular Microscope

40X to 2500X expanded magnification range using high-quality, color-coded objective lenses, and 10X and 25X eyepieces for six unique settings, ideal for viewing semiconductor chips, devices, cellular structures, and microorganisms.

AmScope Binocular Microscope in the UConn IMS Cleanroom

Other Equipment

There are six wet chemistry fume hoods, a combination of stainless steel and polymer units designed for various chemical processing tasks (cleaning, wet etching, etc.) employed in semiconductor and microelectronic device fabrication.

Hood 3 in Bay Area 3 (Solvent Hood) provides a comprehensive selection of developers and removers for various development processes. Hood 4 in Bay Area 3 (Sonicator Hood) is a stainless-steel hood featuring an ultrasonic bath for cleaning applications.

The UN30plus Memmert Universal Oven is a high-quality, hygienic, easy-to-clean stainless steel oven for precisely tuned heating/drying samples under nitrogen atmosphere with unique ventilation control technology and over-temperature protection. Set temperature range: min. 5°C above ambient up to +300°C. Resolution of display for setpoint values 0.1°C up to 99.9°C, and 0.5°C from 100°C to 300 °C.

Bay 3 in UConn IMS cleanroom showing hoods and tables
UN30plus Memmert Universal Oven